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S.M Equipment System
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Graphite Heat Exchanger
압력 용기 제조 설비
- Non-imitative/non-replaceable glass material manufacturing technology / original technology
- High-quality graphite processed products with uniform texture and particle structure
- Flawless impregnation process and consistent mechanical and thermal processing
- Excellent corrosion resistance against acid, solvent, chloride, and halogen complex
- Outstanding thermal conductivity and non-adhesiveness
Application Fields
Glass Lining Process
- Block type exchanger is highly durable and it is applicable to all fields
- It has compact construction method with space saving device. You can clean it easily with a module structure
Silicon Carbide Heat Exchanger
압력 용기 제조 설비
- Manufactured with SIC block sintered purely without direct pressure
- Free from silicone which may reduce chemical resistance
- Excellent thermal conductivity and wear resistance
- Compact sealing system (zero o-ring gasket)
Solid Blocks made of Silicone Carbide from Ø100 to Ø300 mm
Tantalum Heat Exchanger
압력 용기 제조 설비
- Tantalum : Chemical Symbol (Ta) Atomic Number 73. – Regulation ASTM B365, B521, B708; Material Safety Data Sheet (MSDS) Regulation No. 382 and 507
- Niobium : Chemical Symbol (Nb) Atomic Number 41. Regulation ASTM B392, B393, B394
- Both elements exist together in natural state
- Non-toxic and inactive
- High thermal conductivity and ductility
- Automatically forms oxygen coating that acts as manual membrane (protective film)
- Strong resistance against chemical substances and molten metals
- Tantalum has acid resistance property in temperature below 150°C
- Holds properties of other are metals
Stainless steel & PFA Lining
압력 용기 제조 설비
Stainless Steel & Ultra-Clean EP Technology
- Semiconductor-Optimized Design: Custom fabrication of reactors and piping systems using high-alloy stainless steel (e.g., SUS316L) optimized for semiconductor processes
- Ultra-Clean Electropolishing (EP): Nano-scale inner surface roughness control to completely prevent micro-particle generation and metal ion contamination
PFA Lined & Special Coating Total Solutions
- Extreme Thermal & Vacuum Resistance: Maintains flawless chemical resistance and airtight integrity without peeling or blistering, even under rapid thermal cycling and high-temperature/high-vacuum conditions
- UHP Quality Verification: Strict semiconductor-grade cleaning and inspection protocols—including DI water flushing, UV inspection, pinhole testing, and mega testing—to ensure zero-defect delivery
- Comprehensive Lineup: Complete turnkey supply of PFA/PTFE lined reactors, buffer and storage tanks, towers and scrubbers, ISO containers (tank lorries), piping fittings, and specialized valve coatings
Stainless Steel Reactor
PFA Lined Reactor
